Abstract
The present paper reports the influence of working pressure and nitrogen flow rate on the mechanical and wear properties of TiN thin films deposited by DC reactive magnetron sputtering with RF bias voltage. The process of PVD coating is conducted in a nitrogen-argon gaseous mixture at a temperature of 150°C and a DC power of 200W for 90 min. The micro hardness and the wear resistance of the TiN are determined prior to and after the PVD coating. The wear volumes of samples were evaluated using optical profilometre. Worn surfaces were observed using scanning electron microscopy. It was observed that coated samples showed considerable higher mechanical properties and wear resistance compare to uncoated samples. Abrasive wear mechanism was observed on the surface of worn surfaces.
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