Abstract

Core level photoemission with MgKα radiation ( hv = 1253.6 eV) and valence photoemission ( hv = 21.2 eV) are presented for Si(1 1 1)-Mo interfaces at various Mo coverages (up to 3.2·10 15 at cm −2) exposed to 6000 L of H 2O. The metal deposition strongly enhances the oxidation of Si with the complete H 2O dissociation and the formation of a SiO 2-like compound. The results are consistent with an interface growth with the formation of silicide islands.

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