Abstract
The basic component of the most popular contacts to InP is gold. The interaction of gold with InP begins at low temperatures and is accompanied by the strong evaporation of phosphorus. The evaporation vs temperature curve is characterized by a multiple peak structure of the phosphorus loss. The peak structure is due to the formation of AuIn alloys with growing In content at higher temperatures, the formation and decomposition of a AuP compound and the melting of the metallization. Several samples were quenched at characteristic points of the evaporation vs temperature curve for further investigations. Scanning electron microscopy and Auger electron spectroscopic depth profiling of these samples showed changing surface morphology and increasing In content in the gold film in samples which were quenched subsequently at higher temperatures.
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