The integration of CNTs-based flexible tactile sensor and flexible circuit by polymer molding process

Abstract

This study reports an improved approach to implement a carbon nanotubes (CNTs)-based flexible tactile sensor, which is integrated with flexible print circuit (FPC) and is capable of the detecting of normal and shear forces. The merits of the presented integration process are as follows, (1) patterned CNTs, electrical routing, and FPC are integrated and transferred to PDMS substrate by molding process; (2) more robust electrical routing is realized using the parylene encapsulation to avoid delamination; (3) the process can be easily batch fabricated on rigid silicon instead of flexible polymer. In application, the CNTs-based flexible tactile sensor and its integration with FPC are implemented. Preliminary tests show the feasibility of detecting both normal and shear forces using the presented flexible sensor.