The influnence of an accurate incident angle in magneto-optical ellipsometry system

Abstract

In all of the techniques based on magneto-optical materials, generalized magneto-optical ellipsometry is chosen for its surface sensitivity and high magnetic field compatibility. While recent research in this technique does not pay enough attention to the accuracy of the incident angle. This text analyzes the importance of an accurate incident angle in the magneto-optical ellipsometry system. Result shows that the precisely determined incident angle has a strong impact on the system accuracy. This conclusion can be seen as an warning to other workers that, in generalized magneto-optical ellipsometry test, accuracy of the incident angle should be raised to minute level. If the incident angle error changes 1o, the changes of refraction index, extinction coefficient, real and imaginary part of the magneto-optical coupling constant will be 5% 5.4% 8.2% and 9%. So the spectrometer is used to give an accurate incident angle which can accurate to minute level. Then the 200nm Fe film magneto-optical ellipsometry experiment is performed under exact incident angle. The experiment data confirms the importance of accurate incident angle in GME experiment.