Abstract
In this work, the mechanical properties of suspended porous silicon (PS) membranes on bulk silicon are investigated. Micro-Raman spectroscopy is used to characterize stresses in supported PS membranes, in the form of micro-hotplates that are fabricated by a recently developed technique, based on the isotropic etching of silicon under a PS layer, in a high-density plasma reactor. Important information is obtained for the stress evolution of PS as a function of porosity and the optimum annealing conditions in device fabrication.
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