Abstract

The pulsed laser deposition (PLD) technique is employed in this research to fabricate thin films of Silicon-doped Tin Zinc Oxide (Si-SnZnO3) on a Magnesium Oxide (MgO) substrate. Additionally, Si-SnZnO3 thin films are grown on a Strontium Titanate (SrTiO3 or STO) buffer layer with a thickness of 60 nm, which is deposited on the MgO substrate. The target materials used in the PLD technique, Si-SnZnO3, and SrTiO3, are prepared using the solid-state technique. The current study aims to explore the influence of the STO buffer layer on the ferroelectric behavior of the Si-SnZnO3-grown film. Accordingly, the structure, morphology, and film thickness of Si0.5Sn0.5ZnO3/MgO and Si0.5Sn0.5ZnO3/STO/MgO samples are investigated using X-Ray Diffraction and Scanning Electron Microscope techniques respectively. Furthermore, the uniformity of different film thicknesses grown on STO/MgO is investigated using Atomic Force Microscopy. Both the resistivity and the carrier mobility for Si0.5Sn0.5ZnO3 /MgO sample are 3.22 × 103 Ω.m, and 7.35 × 107 m/(V⋅s) (semiconductor), whereas there are 4.31 × 103 Ω.m, and 63.1 m/(V⋅s) (insulator) for the Si0.5Sn0.5ZnO3/STO/MgO substrates, respectively. The Polarization-Electric Field hysteresis loops of different film thicknesses show Lossy capacitor response and Non-linear ferroelectric response for Si0.5Sn0.5ZnO3/MgO, and Si0.5Sn0.5ZnO3/STO/MgO, correspondingly. Moreover, the ferroelectricity parameters of the Si0.5Sn0.5ZnO3 films deposited on the STO/MgO were improved by an order of magnitude compared to the thin film on the MgO substrate. The obtained results indicate that Si0.5Sn0.5ZnO3/STO/MgO configuration could be suitable for Ferroelectric Random Access Memory applications.

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