Abstract
The influence of grating filling factor on the spectral sensitivity of sensors, characterized by full width at half maximum (FWHM) and a figure of merit (FOM), operating on the principle of waveguide mode resonance in dielectric gratings formed on a substrate, has been investigated. Resonant wavelengths were determined for varying grating thicknesses and filling factors. Sensitivity values were obtained for normally and obliquely incident plane waves, as well as for Gaussian beams. Additionally, a scaling rule is presented, allowing determination of sensor parameters using a calculator based on identical grating parameters and corresponding resonant wavelengths. This method holds when linear dimensions of the grating and tested wavelengths are scaled proportionally.
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