Abstract
Analysis of electron-beam-induced current (EBIC) in the line scan method is described in the case of finite generation volume. The influence of surface recombination on EBIC is investigated, when the three-dimensional generation distribution is taken into account. When the accelerating voltage Va of an electron beam is low, the generation volume is assumed to be a point; surface recombination has a great effect on the shapes of curves of EBIC versus scanning distance and on the absolute value of EBIC. When Va becomes high, the generation volume can no longer be assumed to be a point; surface recombination does not affect the shape of EBIC versus scanning distance curves, but reduces the absolute value. The existence of a maximum value of EBIC near the barrier can be explained by an analysis using the finite generation volume. Accurate values of the physical parameters such as the diffusive length are estimated by fitting the experimental data to the theoretical curves for all accelerating voltages.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
