The Influence of Surfaces and Deposition Processes on Pt Structure and Properties

Abstract

Transparent conductive oxides (TCOs), In-Zn-O (IZO) and Ga-Zn-O (GZO), on glass are used as model substrates to study the effect of surface treatments and deposition processes on Pt growth and nanostructure. The TCO type and surface treatments appear to affect Pt nucleation and growth. Ar and O2 plasma surface treatments significantly lowered the contact angle of water measured on TCOs compared to trimethylaluminum surface treatment and samples without surface treatment. Annealing TCO samples in oxygen resulted in lower IZO conductivity and higher contact angle; while annealing in vacuum or hydrogen resulted in increased carbon on the surface, which appears to be related to higher water contact angles and higher conductivity. Higher amounts of zinc and carbon (probably due to contamination from the annealing chamber) on the IZO surface seem to correlate with lower water contact angles and lower conductivity.