Abstract

The influences of the substrate surface topography and the angle of adatom flux on the growth structure of thick sputter-deposited chromium were investigated using a single “point” source for adatom incidence angles of 0, 7.5, 15, 30, 45, 60 and 90°. Two types of columnar growth were observed. (1) A columnar defect structure was associated with geometric shadowing of substrate surface asperities and was always parallel or nearly parallel to the flux of incident atoms. This observation indicates that atomic self-shadowing, as described by the well-known tangent law, does not control defect growth. The results of the present study support a simple geometric shadowing mechanism. The open boundaries of the columnar growth units (defects) in this type of structure are generally associated with reduced corrosion resistance and other (local) degradations of coating properties. (2) A columnar solidification texture was always perpendicular to the substrate surface, with the size of individual columnar regions being related to the topography of the substrate surface.

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