The influence of sputtering power on the giantmagneto-impedance of FeZrBCu film s

Abstract

The giant magneto-impedance (GMI) effect has been observed at room temperature in soft magnetic alloy films of FeZrBCu prepared by radio frequency (RF) sputtering. The dependence of the soft magnetic properties and the GMI effect on the RF sputtering power has been studied. The results measured by electron probe micro-analysis show that the as-deposited films sputtered at 240W possess 29at% Cu and 8732at% Fe. This sample possesses excellent soft magnetic properties and a maximum value of GMI effect, the coercive force is about 68A/m, the saturation magnetization is about 111×1055A/m, and the maximum GMI r atios are 17% and 11% in longitudinal and transverse fields at frequency of 13MHz, respectively. In addition, the dependence of resistance R, inductance X and effective permeability μee on the frequency has been investigated, and the results show that the GMI effect is mainly a magneto-inductive effect at low frequencies.