Abstract
Extensive study of impedance and piezoelectric humidity sensors was undertaken in order to compare their behaviour in detail. Both types of sensor were provided with the same sensitive layer of hydrated alumina. Experimental results deal mostly with the sensitivity range, the temperature dependence and the long-term stability of the impedance and piezoelectric sensors. In addition, the cross-sensitivity of these sensors to some other industrial gases is evaluated. Morphological and structural features of the individual layers of both sensors studied by SEM and TEM are also presented.
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