Abstract
A micro-heater was fabricated by co-firing the laminates of Al 2O 3 green sheets with Pt heater pattern and its lifetime characteristics were studied in relation to the substrate conditions by varying the sintering temperatures and the sintering additives such as MgO, CaO, and SiO 2. The MgO-doped heater showed the longer lifetime than undoped, CaO-doped or SiO 2-doped ones, and the heater lifetime increased with the sintering temperature. This arose from the improvement of connectivity and homogeneity of the Pt pattern by the densification of Pt particles or Al 2O 3 substrate. The migration of the Mg 2+ ion toward the negative electrode was observed as a darkened phase and analyzed by micro-compositional analysis in the heater operated at high temperature. Its tendency was proportional to increasing the MgO doping into high purity Al 2O 3. The desirable amount of MgO doping was 7 mol% both for prevention of Mg 2+ ion migration and for increasing heater lifetime.
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