Abstract
We analyze the role of the electric field distribution in the nano-oxidation process realized by the tip of atomic force microscope (AFM) experimentally and theoretically as well. We show the importance of the sample conductivity and the water bridge in the process applied to bulk GaAs and Ga[Al]As heterostructures in both contact and noncontact AFM modes. The experimental results show that the lines written in contact mode are much wider then those written in noncontact mode. Moreover, saddlelike profile lines can appear for high-resistive samples. These effects are explained by the numerical simulations using finite-element method. We show that the electric field distribution in the system tip-sample is controlled by the sample conductivity. In the case of low-conductive samples, maximum field is located apart from the tip apex for both contact and noncontact AFM modes.
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