Abstract
The influence of the residual birefringence in optical windows on the results of ellipsometric measurements is considered. The optical properties of the windows are described by a complex relative transmittance. Corrections to the ellipsometric parameters, which arise in measuring on static ellipsometers, are calculated under the assumption of weak window anisotropy in a linear approximation. Analysis of the obtained relationships shows that the corrections are partly averaged in two-zone measurements. It is found that the optimal position of the windows corresponds to orientation of their optic axes at an angle of 45° relative to the light incidence plane.
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