Abstract
The approach to synthesis of LiFePO4 using the atomic layer deposited method (ALD-method) is offered and basic laws of the process revealed. Influence of synthesis conditions, precursors’ nature and the sequence of their introduction into the reactor upon the phase composition and morphology of the formed films was studied. The phase composition of the film obtained with the use of ALD-method was investigated in details using a wide series of physical and chemical methods.
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