Abstract
The computerization of the method by which the transmission data of thin hydrogenated amorphous silicon films on transparent substrates are calculated has made the manipulation of a large number of transmission spectra a practical possibility. A comparative study was carried out which demonstrates the effect of pressure, r.f. power and gas flow rate on the density ϱ, the refractive index n(λ), the dielectric constant ε r, the optical absorption α(λ) and the optical gap E 0 of these films which were deposited from pure silane in a glow discharge system. The density of the films was determined by means of the well-known flotation technique using a ZnCl 2 solution as the flotation medium.
Published Version
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
