Abstract
Pb(Zr,Ti)O 3 (PZT, Pb : Zr : Ti = 1 : 0.52 : 0.48) thin films were prepared by dipping-pyrolysis process using a mixed solution of lead-, zirconium- and titanium-naphthenates. The solution was spin-coated onto MgO(100) substrates and the precursor films were prefired at 200°C; in air or in argon for various holding times, followed by final heat treatment at 750°C. Highly oriented (00 l)/( h00) PZT films with smooth, crack-free surfaces were obtained for all the samples except the films prefired in air for 12 and 24 h. Pyrolysis at a low temperature (200°C) in a non-oxidizing atmosphere (argon) was found to be most important for the epitaxy of product films.
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