Abstract
Plasma technology has been regarded as a promising tool for materials preparation or modification. Here, epitaxial SrRuO3 films, grown on different substrates via pulsed laser deposition, were treated by nitrogen inductively plasma. X-ray diffraction results show increased out-of-plane lattice parameters of SrRuO3 films after plasma treatments. Moreover, the magnetic and transport properties of SrRuO3 films have been considerably modulated by means of the plasma treatment. These observations offer an alternative method to tune crystalline structure and functional properties in complex perovskite films via a nitrogen plasma processing.
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