Abstract

During the epitaxial growth process of diamond heat sinks, nitrogen impurities are usually unintentionally introduced, which impact on the thermal conductivity. Therefore, the effect of nitrogen doping on the thermal conductivity of diamond heat sink is studied in this paper. The change of thermal conductivity conforms to the K = CT−1+A(B1/T)T5/2, which is attributed to the synergistic effects of phonons and carriers. With the increase of the nitrogen concentration, the downward trend of thermal conductivity gradually flattened and began to show a weak upward trend. This phenomenon is attributed to the anharmonic effect of lattice vibration rather than an increase in the number of conduction electrons.

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