Abstract

ZrB 2, WN x and ZrB 2/WN x multilayered coatings were synthesized by ion beam assisted deposition at room temperature and 430 °C. Extensive measurements were taken to investigate the influences of N + bombarding energy and deposition temperature on the microstructure and mechanical properties of the multilayers with different modulation periods. A well-defined composition modulation and layer structure with a mixed polycrystalline was found in the multilayers by X-ray diffraction (XRD) and scanning electron microscopy (SEM). Nano indenter analysis indicated that almost all the multilayers synthesized under N + bombardment at different energies possessed higher hardness and elastic modulus than the rule-of-mixtures value of monolithic ZrB 2 and WN x coatings. The highest hardness and critical fracture load were over 30 GPa and 75.7 mN at 200 eV. Deposition temperature also contributed to mechanical properties. At a constant N + bombarding energy of 200 eV, a deposition temperature of 430 °C produced a maximum hardness value of 36.6 GPa for the ZrB 2/WN x multilayer with an estimated modulation period of 5.2 nm. This hardest multilayer also showed the improved elastic modulus and residual stress.

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