Abstract
Using the method of DC magnetron sputtering, nonstructured amorphous metal coatings of Zr75Pd25 composition were obtained with an average deposition rate of 1.3 nm/s at a substrate temperature of 40°C, while crystalline coatings were formed at a higher substrate temperature. A crystalline coating with equilibrium phase composition was obtained at 350°C. Coatings deposited at intermediate temperatures contained predominantly a PdZr phase, in contrast to the equilibrium PdZr2 phase. The surface roughness of amorphous coatings was on a level of 0.2–0.5 nm, which was about ten times lower than the mean roughness of crystalline coatings with the same composition.
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