Abstract
The surface morphology of 100-nm textured Pt films subjected to ion-plasma treatment (IPT) in argon plasma with an Ar-ion energy of 25–200 eV is investigated using a scanning tunneling microscope. As-deposited films are characterized by close values of the surface roughness and average grain size, but their texture strength are different. It is found that IPTs with an ion energy of 25–65 eV lead to increasing roughness, but the roughness of a film with stronger texture is 25–30% less than for a film with weaker texture. This result is caused by a smaller average grain misorientation angle in the case of stronger texture which results in the slower sputtering of grain boundaries. IPT with an ion energy of 200 eV leads to a decrease in the Pt surface roughness by 25% independently of the Pt texture strength.
Published Version
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