Abstract
In this paper features of disintegration of silicon hydrides on Si(100) surface are considered. The simulation of hydrogen TPD-spectra has shown that there are three ways for hydrogen desorbtion and that disintegration of molecules SiH2 proceeds through bimolecular reactions only. The comparison of calculations and experiments allowed to estimate kinetic constants of elementary reactions of pyrolysis.
Full Text 
Sign-in/Register to access full text options
Sign-in/Register to access full text options 
Published version (
Free)
Free) 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
