Abstract
The influence of different indentation parameters including loading type, loading/strain rate, frequency and amplitude on nanohardness depth profiles on DC-MS W-C based coatings thick from 300 to 850 nm were investigated with the aim to determine the best conditions for the measurement of hardness of thin films during sinusoidal loading cycle. Nanohardness tests were performed on G200 (Agilent Technologies) and NHT (CSM Instruments) nanoindenters using standard loading/unloading cycle, CMC (continuous multicycle) mode and continuous stiffness measurement method (CSM) or sinus mode, respectively. The increase of strain rate and sinus amplitude results in decrease of maxima hardness of profiles while the increase of frequency caused its increase.
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