Abstract

The surface roughness and the subsurface damage introduced by manufacturing procedures are important factors affecting the mechanical and optical properties of the optical components. To obtain the relationships between the subsurface damage parameters and optical properties, we study on the influence of grinding process parameters (average abrasive size, grinding force, wheel speed, grinding depth) on the optical properties of high-precision optical components, such as transmittance and absorbance. Results indicate that with the increase of average abrasive size, grinding force or grinding depth, the transmittance of high-precision optical components decreases and the absorbance increases. However, as the wheel speed increases, the transmittance of high-precision optical components increases and the absorbance of high-precision optical components decreases. This work provides a foundation for revealing how the subsurface damage influences on the optical properties and is also useful to probe into the mechanism of damage induced by laser for the high-precision optical components.

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