Abstract
FeCo alloy films with different Fe, Co compositions were prepared by magnetron sputtering and subsequent annealing at different temperatures. The experimental results revealed the importance of Fe, Co composition and Ta on the microstructure and magnetic behavior for FeCo alloy films. With the increasing of Fe composition from 20 to 51%, the Hc of FeCo films increased gradually from 95 to 239 Oe. Iron silicide will form in the interface between FeCo films and Si substrate at high Fe composition and high Ta, which causes the decreasing of Ms from 1480 to 652 emu/cc in Fe36Co64 films with increasing Ta from 400 to 700 °C.
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