The influence of electron reflection at the electrode and secondary electron emission on a strongly magnetized low-pressure RF discharge

Abstract

With the help of a particle-in-cell/Monte Carlo simulation, we study a strongly asymmetric cylindrical low-pressure RF discharge in an axial magnetic field. In particular, the effects of electron reflection from the electrodes and of ion-induced secondary electron emission are studied. The process alone does not change the plasma characteristics; this fact can be traced back to the gyro-motion of electrons in the electrode sheath, which brings non-colliding electrons back to the electrode. If electron reflection is allowed for, the overall plasma density is substantially increased. This effect is found qualitatively in experiments. We furthermore demonstrate the existence of high-energy electrons throughout the bulk plasma; this fact is reminiscent of the well-known -regime of unmagnetized RF discharges.