Abstract

The compositional influence of Cr and Y on the microstructure of Mg―Cr―O, and Mg―Y―O films synthesized by reactive magnetron sputtering has been investigated by transmission electron microscopy, X-ray diffraction and molecular dynamics simulations. A decrease in crystallinity is observed in these films as the M (Cr or Y) content is increased. It is found that M forms a solid solution with MgO for metal ratios up to ~70% and ~50% for Cr and Y respectively. Above ~70% Cr metal ratio the Mg―Cr―O films are found to be completely amorphous. The Mg―Y―O films are composed of Mg(Y)O and Y2O3 nano crystallites, up to ~50% Y metal ratio. Above this ratio, only Y2O3 nano crystallites are found. The preferential <111> MgO grain alignment is strongly affected by the increase in M content. For M metal ratios up to ~50%, there is a selective promotion of the <100> MgO grain alignments and a decline in the <111> grain alignments.

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