Abstract
The influence of space charge effect and effects of stochastic coulomb interaction on spatial resolution of charged particles beams is theoretically studied. The beams of nonrelativistic protons and electrons with a radius about 1 nm were investigated. The cases of different energies in the range of currents from pA to μA typical for modern facilities were examined. It was studied beam broadening due to influence of a space charge with the set distribution and also due to influence of stochastic effects of pair coulomb interactions. The regions of particles energies and beam currents under which effects of space charge and stochastic interaction of the charged particles have significant influence on spatial resolution are selected.
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