The influence of cone-covered surface structures on sputtering and secondary electron emission: Model

Abstract

Abstract The yield and the polar angular distributions of secondary particles emitted from cone-covered surfaces were studied. A model taking into account both the influence of the local incidence angle I and the blocking of the emitted particles by the surface relief was elaborated. For an emission angle a, the transport effect of the particles generated inside the solid was simulated by the standard relation F(a) = (cos a) n and the emission dependence on the local incidence angle was assumed to behave as E(I) = (cos I) -m . Calculations showed that for m= 1 the surface topography only slightly alters the polar angular distribution shape but the yield of the collected particles is always higher than that from a flat surface when m is more than unity. For n= 2, the shape of the distribution curve is significantly different from that of the corresponding flat surface whatever the m values. For n=0, when E(I) very rapidly increases with the incidence angle both the angular distributions shape and the yield are strongly modified by the surface topography.