Abstract
The influence of anodization time with the electrochemical cell design on the fabrication process of porous silicon (PS) nanostructures based on two electrochemical anodization cells (designed single tank cell and double tank cell) with two anodization times (10 and 30 minutes) was studied. Atomic force Microscopy (AFM) characterization had revealed three types of pores, mesopores, mesopore fill of mesopores, and macropore fill of mesopores were obtained from designed single tank cell with (10 and 30 minutes) of anodization time, whilst for double tank cell has not revealed precise information about the size and type of pores. Pores formation have been further approved by current-voltage (I-V) measurement and photoluminescence emission by ultraviolet-lamp (254-366) nm for both electrochemical cells.
Highlights
Porous silicon (PS) is prepared by electrochemical anodization of silicon wafers in electrolyte solution which consists of hydrofluoric acid (HF) and ethanol by providing the silicon wafers with the required current for a specific period of time [1]
Pore size and morphology of porous silicon samples were analyzed by employing Section Analysis of Atomic Force Microscopy image [8, 9]
The influence of the anodization time on the fabrication process of porous silicon nanostructures has been studied based on two anodization times (10 and 30) min. with two electrochemical cells
Summary
Porous silicon (PS) is prepared by electrochemical anodization of silicon wafers in electrolyte solution which consists of hydrofluoric acid (HF) and ethanol by providing the silicon wafers with the required current for a specific period of time [1]. Anodization parameters which are crucial in determine pore morphology and pore size are current density, electrolyte composition, silicon wafer type and doping concentration [4]. The influence of andoization time on the fabrication process of porous silicon (PS) nanostructures with respect to the electrochemical cell design has been studied. This study included two anodization times 10 and 30 minutes with two electrochemical cells design (designed single tank cell and double tank cell). The Atomic force Microscopy (AFM) was utilized to study the morphological features of the porous silicon layers depending on manually analyzing the profile section analysis, Keithley semiconductor characterization system model 4200-scs was used to measure current-voltage characteristics, the photoluminescence emission of PS was tested by ultraviolet - lamp at (254-366) nm wavelength
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