Abstract

An improved resonator method for determination of the complex permittivity of materials in a reflective resonator is presented. The method is specific in the following. In the obtained relationship, imaginary part e2 of the permittivity of an investigated material is determined using the variation of the resonance frequency and coupling coefficient of the resonator observed when a specimen is introduced, which increases the measurement accuracy. The method is approbated in the investigations of high-resistance silicon specimens.

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