Abstract

A functional layer is crucial in a QCM sensor, to immobilize target molecules. The microstructure of the layer determines the sensitivity of the sensor. On the other hand, the microstructure also affects the loading of the sensor. In this study, impedance analysis was used to investigate the relationship between the microstructure and the viscoelastic properties of a petalous stearic acid (SA) functional layer. The SA layer was deposited using a vacuum thermal evaporation technique. Different petalous pillar structures in the elastic layer were generated by varying the deposition time. Analysis showed that the growth of the embedded pillar structures dramatically reduced the conductance and increased the bandwidth. The energy dissipation during the vibration could be related to the interaction between the pillars and the elastic matrix.

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