Abstract
The impact of semiconductor detectors on x-ray spectroscopy is reviewed with particular emphasis on areas where this technique promises significant advantages. Applications in the fields of scanning electron microscopy, electron microprobe analysis, x-ray diffraction, x-ray fluorescence analysis, and x-ray astronomy are described. The effects of various detector system performance parameters such as resolution, count rate capability, stability, efficiency, etc., on the analytical usefulness of the system are examined in detail. The fundamental and practical state-of-the-art limitations on detector system performance are discussed in terms of their present and future impact on the usefulness of the energy analyzing technique for x-ray spectroscopy.
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