Abstract
Binary FePt films with compositions in the range of 42.4 to 54.0 at. % Pt were sputter deposited at temperatures between 100 and 300 °C. Films deposited at 250 and 300 °C were fully L10 ordered, whereas films deposited between 100 and 200 °C were either A1 or a mixture of A1 and L10. Differential scanning calorimetry studies following deposition showed a bifurcation in the post-deposition formation characteristics of the L10 phase for films deposited between 100 and 200 °C depending on film composition. For films with compositions >47 at. % Pt, L10 formation kinetics were identical to those for room-temperature deposited films. In contrast, for films with <47 at. % Pt, significantly higher temperatures were needed for full transformation to the L10 phase. Thus the choice of deposition temperature and film composition is critical to achieving fully L10 films during deposition. The Curie temperature of the L10 phase was not impacted by the deposition temperature.
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