Abstract
In the measurement methods of microcosmic surface topography, laser interference microscopy with high precision and non-contact advantages, has been widely used. Based on the current processing algorithms of interference image, this paper studies principally the processing algorithms of single-wavelength laser interferometry and analyses the image processing algorithm of two-wavelength laser interferometry. On the basis of the original measurement precision, the two-wavelength measurement method can extend the depth measurement range and restore effectively the tested surface topography.
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