Abstract
The ignition voltage of micro-satellite and MEMS fuse become more and more lower, the conventional electro-explosive devices are hardly meet the requirement. In this paper, Ni-Cr metal film bridge of different size/substrate were designed by MEMS processing technology. By using Neyer D-optimal sensitivity test method, it got the result that the threshold of ignition voltage would decrease with the decrease of designing size, and the threshold of ignition voltage with the glass substrate would be less than the silicon substrate.
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Schedule a callMore From: IOP Conference Series: Earth and Environmental Science
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