Abstract
CRFHCP RF hollow cathode plasma graft polymerization has characteristics of discharge density, high discharging efficiency, good surface modification effect, discharge area and regional separation, applies to modify large area thin film material surface. The uniformity modifying large area plasma material surface is the technical difficulty related technical personnel has been concerned with, the key point restricting HCRFCP technology industrialization application too. This paper analyzes influence factors of the large area thin film materials plasma graft polymerization uniformity; applies simulation software and mathematical models; makes optimized design to the hollow cathode discharge electrodes and graft polymerization distributing pipe. The experiment proved, the uniformity processing large area battery diaphragm is better to apply the hollow cathode plasma graft polymerization, and is suitable for industrial application.
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