Abstract

The compact synchrotron X-ray source, HELIOS built by Oxford Instruments, was commissioned at IBM's Advanced Lithography Facility at Fishkill New York in 1991. Key features and specifications for HELIOS are described, emphasising the unique features of this storage ring X-ray source. The performance of the first machine is outlined, based on almost two years'routine operation, identifying key factors such as output flux, beam lifetime and reliability. A description of the second HELIOS and enhancements to its performance is included

Full Text
Published version (Free)

Talk to us

Join us for a 30 min session where you can share your feedback and ask us any queries you have

Schedule a call