Abstract

It is important to study the pumping mechanism of the helical channel for the purpose of improving pumping performance of molecular pumps. A new model to investigate the moving helical channel is proposed under the condition that the channel depth-to-radial clearance ratio is > 1. The pumping performances of the helical channel are calculated with the new model and the geometric sizes of channels are optimized. In this way, the necessary theoretical basis has been provided to design and improve the pumping performance of compound molecular pump (CMP) or to develop a new type molecular drag pump (MDP).

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