The height error range of multilayer diffractive optical element with consideration of polychromatic integral diffraction efficiency

Abstract

According to the expression of the phase delay and diffraction efficiency of the diffractive optical elements(DOEs), the expression of diffraction efficiency of multilayer diffractive optical element(MLDOEs) with the height error in fabrication process was described in this paper. We selected the PC and PMMA used usually at optics as substrate material of MLDOEs, and analyze the height error range of multilayer diffractive optical element with consideration of polychromatic integral diffraction efficiency basing on the mathematical analysis model of the relationship between height error and diffraction efficiency for MLDOEs. The range of height error the diffraction efficiency of MLDOEs was given. This model can be used to guide the design and fabrication process of hybrid diffraction refractive optical system for optical engineer.