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Abstract
A new kind of rotary motion feedthrough is described. The principle of the harmonic drive proves to be suitable for an R.M. feedthrough, with the following advantages over commercially available feedthroughs of the wobbling bellows type: 1. 1) High accuracy (±0.2° with a torque load of 50 kg·cm). 2. 2) Built in speed reduction of 1:111 from input shaft in air to output shaft in UHV. 3. 3) High rotational speed (up to 700 r.p.m.) of the input shaft is allowed.
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