Abstract
Aligned multi-wall nanotubes (MWNT) have been grown using hot filament plasma enhanced chemical vapor deposition (HF-PECVD) on a variety of substrates. The growth kinetics of carbon nanotubes is found to be governed by the morphology of the metal film, the precursor gas composition as well as the temperature of the hot filament. It is observed that nanosized grain particles formed on FeNiCo films are optimum for carbon nanotube growth, since it is known that the substrate morphology has a direct influence on the growth of carbon nanotubes. The aligned MWNT and graphite films are also studied using secondary ion mass spectroscopy (SIMS) and ultraviolet photoelectron spectroscopy (UPS). Our results suggest that bi-directional growth, namely the root and tip growth, takes place during the synthesis of the carbon nanotubes using HF-PECVD.
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