Abstract
We have demonstrated the molecular beam epitaxial growth of (Al,Ga)Sb tilted superlattices (TSLs) on 2° vicinal (100) GaSb and GaAs substrates. The existence of (Al,Ga)Sb TSLs proves that step-flow growth can occur in this material system, and in the presence of strain. Lateral fluctuations in the tilt angle of the superlattice are observed and are found to be caused by a non-uniform distribution of incorporated adatoms which is correlated with the surface step density. The (Al,Ga)Sb TSL growth was also combined with InAs growth to form an InAs quantum well with “corrugated” barriers consisting of (Al,Ga)Sb TSLs. The electron mobilities in this structure exceeded 6×10 5 cm 2/V⋯s.
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