Abstract
Pulsed laser deposition (PLD) of CaF 2 was performed by employing eclipse (shadow mask) method in addition to the conventional method. Although droplet formation was intercepted by eclipse method, there still remained fragments (∼3 μm) on the deposited surface. The various ways of laser irradiation experiment gives us a new finding and implementation. Fragment-free CaF 2 thin films were successfully obtained by controlling the laser irradiating position in the target (standstill target method) during the deposition even under the two-photon absorption process.
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