Abstract
Thin films of SnO 2:Sb were prepared by ultrasonic spray pyrolysis method. The role of antimony in the SnO 2 is demonstrated by FTIR. It is found that at low Sb concentrations, the Sb ions prefer to substitute Sn 4+ in form of Sb 5+. While beyond a certain Sb concentration, Sb ions start to be reduced to Sb 3+, which have a negative effect on carrier concentration that, in turn, affects the reflectivity of SnO 2:Sb films. The increased disorder of SnO 2 at high Sb concentration is also shown by FTIR. The discussion of carrier scattering suggests that the ionized impurity and/or neutral impurity scattering are the dominant scattering mechanisms.
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