Abstract
The f-ratio method is a new quantitative X-ray microanalysis method developed based on a cold field emission scanning electron microscope/energy dispersive spectroscopy system. The f-ratio is calculated with the characteristic X-ray intensities, and the Monte Carlo simulation is employed to build the theoretical relation between the system composition and the f-ratio. In this study, the f-ratio model is formulated with the elemental concentrations and the f-ratio coefficients. The f-ratio models in the binary S-Fe system and the ternary O-Al-Si system were studied, and the beam energy effects were investigated. The quantitative analyses were performed on the standard pyrite (FeS2) and kyanite (Al2SiO5) specimens, and the results show that the f-ratio model is able to achieve a satisfying accuracy.
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