The formula for the secondary electron yield at high incident electron energy from silver and copper

Abstract

Based on main physical processes of secondary electron emission from metals, the relation that the multiplication of the real efficient secondary electron yield at high incident electron energy from metals, energy exponent and incident energy of primary electron is equal to constant C was deduced; based on the relation between the real efficient secondary electron yield at high incident electron energy from metals and secondary electron yield, the relation that the multiplication of the secondary electron yield at high incident electron energy, energy exponent and incident energy of primary electron is equal to constant D was deduced. The energy exponent n of primary electron in the energy range 10–100 keV hitting on silver and copper and the constant D are computed with the ESTAR program and experimental results in scanning electron microscope (SEM), respectively, therefore, the formulae for the incident energy dependence of secondary electron yield in the energy range 10–100 keV from gold and aluminum were deduced, the formulae were proved to be true by experimental results in SEM, the results were discussed and a conclusion was drawn that the formulae from silver and copper were successfully deduced.